Used TEGAL 965 #293656298 for sale

TEGAL 965 is an advanced plasma etcher that is widely used in a wide variety of industries, such as semi-conductor, optical, and medical device industries. 965 is capable of controlling many parameters of etch processing, making it highly versatile. TEGAL 965 can also etch a variety of materials, including silicon, aluminumnitride, and gallium arsenide, among many others. 965 features an advanced 8-inch wafer processing chamber, and can be equipped with a 2-diameter beamline that increases the machine's etch rate. TEGAL 965 has an integrated, fully automated plasma source which allows for faster etch rate adjustment and control, leading to improved process uniformity and repeatability. The machine has excellent process control capabilities, with the ability to set various timing cycles, check the pressure sensor readings, and even repeat the same etch cycle up to five times if a process parameter needs to be tuned. 965 also offers a wide range of advanced features that make it stand out from other etchers on the market. The machine is equipped with a multiple-nozzle system that allows for automated control of both the etch time and the etch rate. It also includes a PIEZO oscillator that is adjustable, allowing for finer control of the etch process. TEGAL 965 also features an automatic wafer manipulator which allows for higher precision positioning of the wafer, as well as a global etch algorithm that ensures etchway uniformity and repeatability. Overall, 965 is an excellent etcher for those who require high levels of accuracy and precision in their processes. It features many advanced features that make it a versatile tool, and is highly reliable in a wide range of applications. The ability to precisely control the etch process is a great advantage, allowing the user to easily replicate processes with great accuracy. TEGAL 965 is an excellent choice for those seeking a reliable and versatile tool for etching a variety of materials.