Used TEGAL 965 #293753247 for sale

TEGAL 965 etcher (or asher) is an advanced etching and ashing tool used for the fabrication of semiconductor chips. It is capable of etching and ashing large areas at high speed and with superior results. The large area is divided into two parts, an etching area and an ashing area. The machine can process from 5" to 8" substrates, with a maximum of 12" being recommended for best results. 965 uses a patented gas-mixing technology, allowing for high density plasma (HDP) etching, enabling a faster etching rate with improved plasma uniformity, high uniformity of the plasma clean, and a reduction in wafer warping. The etching process uses a high-frequency radiofrequency (RF) plasma to remove material rapidly and uniformity, reducing both the etching time and improve baseline etching results. The etching time can be tailored to the specific application, enabling cycle shortening and highest throughput. The etching processes different gases, such as nitrogen or helium, to achieve specific desired results. Specialized etching process are available, such as reactive ion etching, oxygen reactive ion etching, and photoresist etching. The etcher can also perform other processes such as stripping, thinning, and post-etch modification. TEGAL 965's ashing process uses oxygen-based plasma to uniformly remove material from the wafer surface. HDP ashing process is also available for high speed, high uniformity and high purity material removal. This process is superior to traditional ashing process for sensitive wafers, providing better uniformity and purity of results. 965 is a reliable and valuable etching/ashing tool for wafer fabrication. It is easy to setup and operate, is known for its accuracy and speed. This combined with the high quality and uniformity of the process results makes TEGAL 965 an ideal tool for a variety of applications including MEMS, microprocessors and wireless communications. Finally, the full-featured 965 supplies superior control over etching and ashing processes, enabling to achieve optimal results too.