Used TEGAL 980ACS #9395473 for sale

TEGAL 980ACS is an etcher and asher designed for use by semiconductor processing and research professionals. It is a fully-automated, high-speed, high-throughput equipment designed for processing wafers in a variety of applications. TEGAL 980 ACS features a PC-based control system and a 16-bit-RISC-driven architecture to ensure fast, highly accurate control of the etching process. The unit also provides a wide range of capabilities, including: multiple process recipes and highly adjustable parameter settings; a Windows XP-based graphical user interface (GUI) for recipe and parameter selection; temperature, pressure and flow-controls; loading and unloading options; and a 750W microwave generator. The etcher has two independent chambers, each capable of holding up to a 6-inch wafer. Both chambers are capable of passively, or actively, being regulated while all other etching parameters remain constant. Chamber temperatures are programmable from room temperature up to 700°C, with the ability to heat up at a rate of 3°C per second. 980ACS also features an automated load/unload machine which is designed for compatibility with various transport tapes and wafer cassettes. The tool can process up to 12 wafers per minute and features a touch screen display for recording and displaying real-time etching process data. The asset operates on a three-phase 208-VAC power and is capable of delivering a total of up to 750W of power to both chambers. As one of the most advanced etchers in the industry, 980 ACS is capable of accurately producing etch depths of up to μm, which makes it ideal for applications such as deep-etching, implantation and photolithography.