Used TEGAL Chamber for 415 Plasma asher #293661202 for sale

TEGAL 415 Plasma Asher is a precision etcher / asher designed to provide the highest quality, repeatable results for a wide range of wet and dry plasma etching applications. The chamber is designed to optimize throughput, repeatability, and process control. TEGAL 415 Plasma Asher features a large-capacity quartz chamber that offers optimized uniformity and temperature control for a wide variety of etch chemistries. The chamber's body is constructed of durable, light weight, anodized aluminum that can be quickly and easily opened for maintenance and refills. The user-friendly PC display allows for easy setting and monitoring of parameters. TEGAL 415 Plasma Asher also features a unique, integrated, advanced electron-beam activating source that produces the highest-quality plasma possible. This ensures efficient, repeatable results without expensive building blocks or additional equipment. It features an adjustable power source for accurate control of the process parameters. TEGAL 415 Plasma Asher also boasts high-quality design features including adjustable bias voltage, adjustable pressure, low I/O delay, and cryogenically cooled process gas lines. These features allow for higher quality, more repeat accuracy, and improved lifetime of tool components while providing tighter specification control. TEGAL 415 Plasma Asher also provides multiple safety features that protect both the operator and equipment from potential hazards. For example, the chamber includes an emergency shut-off switch that engages if a pressure rise is detected. There is also an alarm system that will alert the operator to any potential safety issues before they become serious problems. TEGAL 415 Plasma Asher has a highly flexible design that allows it to be easily configured for a variety of etching applications, making it ideal for a variety of production processes. The wide range of etching capabilities makes this system the perfect tool for any production line. With its comprehensive capabilities, TEGAL 415 Plasma Asher is one of the best etching solutions available today.