Used TEGAL Plasmaline 415 #9008684 for sale
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ID: 9008684
Asher / etcher
Stripper batch loaded
Barrel type plasma reactor
Chamber size (mm): 125 (high), 265 (deep)
For (50) 4" wafers
(3) Gas channels
Missing relays
RF generator:
50-300 W
Peak power: 1,000 W
13.56 MHz.
TEGAL Plasmaline 415 is a powerful, user-friendly etching machine designed to meet the advanced fabrication requirements of modern industry. It utilizes a patented, ionized-beam technology that enables precise and deep etching of complex shapes and patterns on metallic surfaces. The results are ultra-accurate parts with fine surface finishes and fast cycle times. The machine features modular and scalable architecture, allowing for a variety of configurations. Depending on the application and production, users can select between two standard process options: thermionic transfer or reactive ion etching. Both technologies offer increased accuracy, higher resolution, and higher throughput than traditional etching techniques. Plasmaline 415 is powered by a smart controller that is capable of monitoring and controlling the process parameters in real-time. This allows for ultra-fast and accurate modulation of all the process characteristics. The integrated vacuum system ensures stable and repeatable results, and the integrated auto-purging system avoids contamination. TEGAL Plasmaline 415 is constructed primarily of stainless steel, giving it a robust and symmetrical profile. Its advanced safety measures and low noise output make it ideal for a busy production environment. The machine measures 209 x 62 x 71 cm and weighs approximately 680kg. Plasmaline 415 also includes a built-in vacuum sensor to monitor and adjust etching depth. The fully automated machine operator interface allows for easy and intuitive access to all the available parameters for etching. The integrated program library ensures programming accuracy, allowing users to set-up and operate the machine quickly and reliably. The Plasmaline etcher is an invaluable resource for modern industry, providing detailed and repeatable results, faster processing, and greater accuracy than ever before. Its flexible and user-friendly architecture, combined with its advanced technology, make it the ideal choice for engineering and manufacturing firms of all sizes.
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