Used TEGAL Plasmaline 415 #9239233 for sale

TEGAL Plasmaline 415 is a state-of-the-art etcher/asher designed to provide a precise and cost effective method of achieving vertical-profile controlled etching of a wide range of materials. The machine's innovative design includes both top-down and side-to-side movement to etch finer feature size than many of its older technologies. Plasmaline 415 is capable of patterning circuit board level antennas, creating spectacles with exceptional profile control, and producing several sizes of antenna structures. The equipment uses an advanced frequency and power control to precisely control the plasma energy level, allowing for the formation of finer features. Additionally, the system features a highly accurate gas delivery unit, delivering a pre-programmed mix of process gases to the process chamber at precisely the right mix, pressure and flow rate, ensuring repeatable results. The gas flow rate, process chamber pressure, and temperature are all precisely managed and monitored for optimal process conditions. The machine is also equipped with a user-friendly graphical user interface, giving users complete control of the machine's operation, including profiles, recipes, and manual control. The software interface not only aids in creating recipes and controlling the process, but also provides a suite of diagnostic tools and reports for troubleshooting and process optimization. TEGAL Plasmaline 415 is available with a choice of process chamber sizes, from 1.6 to 8.2 inches, capable of etching a variety of materials, including copper, aluminium, gallium arsenide, and indium phosphide. The tool also ships equipped with a high-frequency remote-plasma-source and a reactive ion platen, providing both dry and wet (rough) etching functions as required by specific applications. The asset performs well in the laboratory and in the production environment, and is designed to meet or exceed SEMI-S2-0208 standard for manufacturing cleanliness. Safety features include a sealed process chamber to protect personnel from hazardous materials, as well as a built-in re-circulation filter to capture airborne particles. Overall, Plasmaline 415 is an ideal etcher/asher for research and development, as well as high-volume production applications. With its precision accuracy, reliable process control, easy to use software, and safety features, TEGAL Plasmaline 415 provides a superior etching solution for a variety of applications.