Used TEGAL Plasmaline 515 #9244783 for sale

TEGAL Plasmaline 515 is an advanced dry plasma etching and ashing equipment. It's designed to provide in-line processing of a wide range of materials, such as silicon oxide, GaAs, gallium nitride and photoresist. Plasmaline 515 features a high-resolution, high-vacuum Plasma Source and a sophisticated large-area Microwave Plasma Source. It utilizes multiple microwave channels to achieve precise etch and ash results in an efficient and productive manner. TEGAL Plasmaline 515 is designed with advanced automation, allowing it to automatically detect plasma parameters and make adjustments to ensure uniform etch and ash production. Its sophisticated control system provides precise engineering control over matched etch and ash across the entire integrated processing line. Additionally, the unit features independent Process Gas Control, allowing it to achieve optimal process conditions and make corrections quickly and accurately. Plasmaline 515 is also capable of supporting multiple formats for wafers and the highest possible etching homogeneity levels. It is designed to use novel PlasmaJet technology, which helps to maintain superior etch uniformity. It also has a tiltable substrate holder, which aids in improving etch pattern uniformity. TEGAL Plasmaline 515 features a modular design, allowing for upgrades and enhancements as needed. It utilizes a fully integrated Vacuum Cooling Machine for cooling the substrate before and after etching. The Vacuum Cooling Tool helps to improve etch uniformity and process throughput, while preserving the lifetime of the process chamber. In summary, Plasmaline 515 is an advanced dry plasma etcher and asher that provides in-line processing of several materials, with highly precise etching and ash capabilities. It features advanced automation, sophisticated control systems, and modular designs, allowing it to meet the highest quality standards.