Used TEL / TOKYO ELECTRON 305D #293659035 for sale

ID: 293659035
Wafer Size: 12"
Etcher, 12".
TEL / TOKYO ELECTRON 305D is a highly advanced etcher/asher equipment designed for the production of advanced semiconductor devices. It provides an extremely uniform and repeatable environment to ensure clean and reliable etching and ashing processes. The system consists of a multi-turret single-wafer transport unit, a highly efficient etch/ash source, a vacuum pumping machine, and a computer control tool. This asset features maximum efficiency with minimized operating costs. Its multi-turret single-wafer transport model is designed for the simultaneous handling of up to eight process wafers with a significantly reduced overall surface area. This allows for more efficient wafer transport, decreasing time and energy consumption. The high-performance etch/ash source provides efficient processing and reduced material waste. It is also designed to reduce particle-related problems and to minimize the possibility of contamination. The RF plasma vacuum generator ensures a stable pressure and uniform plasma density of the whole etch/ash chamber, allowing for excellent etching and ashing quality. The sophisticated computer control equipment facilitates fast and easy set-ups, throughput monitoring, automatic batch and table tuning, along with remote controlling of the system. It also includes a user friendly graphical user interface, providing a user-friendly menu driven graphic interface and remote display for optimizing the etch/ash process. TEL 305D is engineered for use in high-volume production of Next Generation Network (Ngn) devices and microelectronic circuits. It can provide exceptionally uniform and clean etch/ash processes, offering high reliability and process scalability to meet the most demanding requirements. Its advanced features and stable performance make it the ideal unit for the fabrication of these devices.
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