Used TEL / TOKYO ELECTRON 305DD #9389396 for sale

TEL / TOKYO ELECTRON 305DD is an etcher / asher designed for high volume process needs in the semiconductor fabrication industry. It employs high-capacity continuous film transport technology, which reduces load time and improves throughput of wafers processed in the tool. The 305DN features a dual-chamber design, allowing the user to quickly switch between two processes without having to stop the tool. The process recipe can be easily updated and transmitted to the machine, ensuring fast and efficient operation. The etch chamber can accommodate 400mm semiconductor wafers, while the ashing chamber can process up to 300mm wafers. The etching process can be controlled with high precision and accuracy, while the ashing process features a unique RF plasma system, which is capable of controlling the power, duration and cycle time to deliver consistent results. TEL 305DD also features state-of-the-art heat spreading and other thermal management techniques to ensure optimal performance and uniformity in etching process. To ensure safety, the tool has an integrated safety screen, which blocks the emission of dangerous particles. The advanced automation feature of the tool enables it to adjust the physical parameters, including pressure, temperature, RF power, and speed, to suit the process application, thereby reducing the chances of any product failure. TOKYO ELECTRON 305DD is equipped with an infusion pumping module, which provides a steady supply of fresh chemicals to the etching chamber, increasing the product lifetime and reducing maintenance costs. Finally, it comes with a monitoring system which allows users to monitor process parameters and production performance in real-time.