Used TEL / TOKYO ELECTRON 308 SCCM #9128511 for sale

TEL / TOKYO ELECTRON 308 SCCM (hereafter referred to as the 308) is a state-of-the-art etcher/asher, designed for use in the advanced etching and cleaning of hard-to-reach areas. It has a mainframe equipped with a selectable, variable auto-focus Laser Scanning equipment (VAS). This system scans the area to be etched or ashed with both regular and rhythmically oscillating laserwaves, ensuring uniform depth and uniform coverage. Additionally, the 308 utilizes a high-temperature exhaust hood that ensures safety and a clean work environment. The 308 is truly an all-in-one unit, with a built-in multi-gas feed and an integrated temperature control unit. The 308 is easy to use, setting up in just a few minutes and including an easy-to-read multi-language user manual. The 308 allows for the etching/ashing of both metals and non-metals, in depths ranging from 3nm to 1.5μm. What makes the 308 truly remarkable, is that it is capable of creating complex 3D patterns and high aspect ratio structures. The result is an incredibly accurate and uniform process, time after time. The 308 also features a variety of accessories, such as an automatic powder feeder, digital optical monitoring package, alignment and focus scoring machine, and an automatic sample retrieval tool. This allows for increased control and a higher degree of throughput control. Additionally, an RF induction heating asset is available for controlling the temperature of the etching process, ensuring that the quantity of materials removed remains the same. Overall, TEL 308 SCCM is an advanced etching/ashing model that offers precision, safety, and superior levels of control for the complex etching of hard-to-reach areas. Thanks to its high-power, high-temperature exhaust hood, its variable auto-focus equipment, and its many other features, the 308 is an incredibly versatile, user-friendly system that offers an incredibly accurate and precise etching experience.