Used TEL / TOKYO ELECTRON 580 LC #62133 for sale

TEL / TOKYO ELECTRON 580 LC Asher is a medium-sized equipment for etching or ashing films or other thin samples for application in a wide variety of processes. It is a gas-source etcher that uses oxygen or other gases to etch sensitive films or similar products. The innovative system offers a volume of approximately 11 liters, and features a circular sample design. This makes it ideal for a variety of applications, such as Nanoimprint Lithography (NIL) and other thin films as well as patterning applications. The unit is designed in a vertical structure, with a thinner top cover to increase thermal cycling times and a thicker bottom cover to support greater mechanical stability. The machine also utilizes a high-speed gas flow in the upper chamber and is designed with a low level of pressure in the lower chamber. This combination provides a low level of pressure and the high-speed gas environment for rapid etching of films and other thin samples. The etcher/asher is equipped with an integrated display for monitoring and controlling the process of etching/ashing films or similar products. This includes an LCD display that shows a time-dependent profile of the process, including details such as pressure, temperature, and current. The tool also integrates with various external devices, such as computers, to facilitate data export and analysis. Additionally, the asset comes with a range of safety features, such as alarms and LED indicators, which alert the operators of any potential problems related to the etching process. TEL 580 LC Asher is a reliable and versatile model for etching or ashing a variety of thin films or similar products. It is a safe, efficient, and high-precision equipment that can be used for a wide variety of applications, including Nanoimprint Lithography (NIL) and patterning. This system is well-suited for both laboratory and production environments and is a great choice for any project requiring precision and reliability.