Used TEL / TOKYO ELECTRON 8500PE #9146011 for sale

TEL / TOKYO ELECTRON 8500PE is a high-performance automatic etcher and asher specifically designed to meet the needs of the semiconductor production market. With a single chamber, TEL 8500PE is a versatile machine that is capable of both etching and ashing processes, and it is capable of doing so at high rates of throughput and with high levels of precision. TOKYO ELECTRON 8500PE is equipped with two pneumatically-actuated wafer cassettes that can hold up to 200 200mm cassettes or 150 300mm cassettes. The wafer cassettes are loaded into the equipment chamber, and the wafers are then transferred to the etching or ashing module via an integrated handling robot. The robot also contains vision and end-effector systems which allow it to accurately transfer the wafers to and from the etching or ashing module. The etching and/or ashing process is then monitored and controlled through an advanced controller system. This controller unit features an easy-to-use graphical user interface which allows for real-time monitoring and control of the process. It also features a variety of process recipes and tracking capability, allowing operators to quickly and easily set up and maintain production processes. 8500PE features a variety of etching and ashing tools and gasses to provide a wide range of process capabilities. It also features an advanced exhaust gas recovery machine which allows for reduced environmental impact by recovering up to 99% of the process gasses. Finally, TEL / TOKYO ELECTRON 8500PE is capable of handling a variety of wafers such as silicon, gallium arsenide, and others. It also features multiple heating zones, allowing for a range of process temperatures, and it can accommodate wafers up to 300mm in size. Overall, TEL 8500PE is a robust and powerful automatic etcher and asher specifically designed for the semiconductor production market. With its advanced controller tool, process versatility, and environmental friendliness, it is well-suited to meet modern semiconductor production needs.