Used TEL / TOKYO ELECTRON 8500PE #9158331 for sale

TEL / TOKYO ELECTRON 8500PE is an etcher/asher used in semiconductor chip manufacturing. It's designed for a wide range of applications, including resist thinning, shallow trench isolation (STI), metal electrode formation, shallow trench contact (STC), and dielectric etch. TEL 8500PE is a powerful etcher/asher that utilizes Parallel Electron Analogue (PEA) technology. This enables it to generate high etch uniformity with a high ion number density and an even plasma distribution across the substrate surface. The PEA technology helps to minimize the process non-uniformity and provides higher aspect ratios for critical etch steps using both directional and non-directional etching. TOKYO ELECTRON 8500PE has a highly flexible process chamber which provides for a wide range of substrate sizes and shapes. Additionally, the internal wafer stage can be moved to various positions for improved process capability and control. 8500PE is capable of operating multiple gases simultaneously or independently, making it suitable for a variety of different etch applications. The gas flow is precisely controlled with the integrated gas flow system. The etch process control of TEL / TOKYO ELECTRON 8500PE is managed via a touch screen user interface which is user-friendly and optimized for quick product change between processes. TEL 8500PE is also equipped with advanced control functions such as fine-tuning the etching conditions in real time and different recipes for different applications or processes. Additionally, the Etch Data Base stores user-defined recipes and processes for convenient recall and to streamline the etching process. TOKYO ELECTRON 8500PE features advanced diagnostic systems and interlock controls to detect and minimize process failure, ensuring high process reliability. It also features excellent cooling and pressure stability, allowing for a more uniform etch profile. Overall, 8500PE is a reliable and efficient etcher/asher for production of a wide range of semiconductor devices. With its high process uniformity, flexible process control, and advanced diagnostic system, TEL / TOKYO ELECTRON 8500PE is designed to deliver superior results.