Used TEL / TOKYO ELECTRON AMN-5082 #293653819 for sale

ID: 293653819
Chamber for SCCM.
TEL / TOKYO ELECTRON AMN-5082 is an etcher that can provide superior process performance capabilities, making it an ideal choice for manufacturers who require precision etching services. Specifically designed to meet the requirements of etching processes, this tool comes equipped with a wide array of capabilities, including a simplified handling equipment, as well as a variety of substrate sizes and materials. TEL AMN-5082 is capable of etching various metallic and non-metallic substrates, allowing for precision-process control and high-volume production. The tool's etching system consists of an advanced turntable, vacuum baseplate, resist quenching unit, and coolant-mist control. The turntable is composed of high-precision steel bearings, which enable the generation of a consistent high-quality etching profile, while the low-vacuum baseplate ensures a safe and reliable etching process. TOKYO ELECTRON AMN-5082 also features a resist quenching machine that minimizes the occurrence of substrate oxidation and resists over-etching from occurring. This is achieved by releasing a chemical agent into the chamber at specified intervals. This can be adjusted according to the application requirements, ensuring that the target etch rate is achieved anytime. In addition, the coolant-mist control feature ensures effective control of cooling temperatures, helping to prevent contamination during etching processes. AMN-5082 also provides a variety of benefits in terms of its handling tool. Utilizing a three-axis motor-feedback asset, the etcher can automatically adjust its position to accommodate different substrates and substrate sizes. This is especially useful when multiple substrates need to be etched together, as the tool can easily adjust its motion to ensure uniformity. Furthermore, the tool can be programmed to automatically synchronize etching processes to save time and reduce errors. Overall, TEL / TOKYO ELECTRON AMN-5082 is a well-rounded etcher that provides reliable etching capabilities across many different materials. With its ability to accommodate a variety of substrates, its automated handling model, and its advanced resist quenching and coolant-mist control features, TEL AMN-5082 is an effective choice for manufacturers needing precision etching services.
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