Used TEL / TOKYO ELECTRON Chamber for SCCM #9204386 for sale

TEL / TOKYO ELECTRON Chamber for SCCM is a high-performance etcher/asher designed for etching and ashing processes. This chamber is ideal for semiconductor device fabrication, especially in multi-layer fabrication, and has been used in a wide range of applications. It enables process control with high accuracy and repeatability, from simple to complex etch/ash processes. TEL Chamber for SCCM offers a number of features such as its dual furnace system for annealing and ashing, and its built in gas system which provides accurate and consistent gas and flow control. This chamber features an efficient mixing system which allows for efficient particle manipulation, and has a variety of functions tailored to the process and application requirements. This chamber also incorporates an advanced software suite which allows for comprehensive process control and monitoring. TOKYO ELECTRON Chamber for SCCM also offers a number of safety features such as low O2 gas concentration sensors and emergency shut-downs to ensure safe operation. Additionally, the chamber is designed to be air-tight and leak-resistant, enabling stable and repeatable operations. This chamber is also equipped with advanced temperature control technology which allows for precise and uniform operation over an extended range, making it suitable for a variety of materials and recipes. It can be operated through the use of chamber parameter optimization parameters, allowing for 8 parameters to be used simultaneously. Chamber for SCCM is used in a variety of settings and applications, from photomask and LCD fabrication to SOI and memory device fabrication. This chamber is a reliable and efficient addition to any semiconductor processing line, offering high process control accuracy and repeatability.