Used TEL / TOKYO ELECTRON Chamber for Tactras Vigus #9353006 for sale
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ID: 9353006
Wafer Size: 12"
Vintage: 2006
Strip chamber, 12"
ATC MM0011
2006 vintage.
TEL / TOKYO ELECTRON Chamber for Tactras Vigus Etcher/Asher is a state-of-the-art etching/ashing equipment designed to provide superior results with minimal processing time. Its unique design incorporates a vacuum chamber with a digital motor control system for precise and efficient operations, and a closed-loop process-monitoring unit for maintaining precise parameters. The machine is equipped with an advanced Programmable Logic Controller (PLC) that monitors and controls each step of the etching/ashing process, enabling high-precision etching/ashing results. TEL Chamber for Tactras Vigus Etcher/Asher has numerous features that make it a unique choice when compared to other etching/ashing systems on the market. First, its closed-loop process-monitoring tool allows for the precise estimation of the cycle time, preventing over-processing and the destruction of valuable materials. Second, its advanced PLC asset allows for the optimization of the etching/ashing process by increasing etching speed and reducing the probability of breakage. Finally, this model includes a variety of auto-programming tools, including program-based and interactive programming, and real-time monitoring and editing of etching/ashing parameters. In terms of performance, TOKYO ELECTRON Chamber for Tactras Vigus Etcher/Asher is capable of etching/ashing substrates up to 12mm thick and 700mm square size with minimum distortion. It can process etching/ashing jobs with a remarkably low putty-time of 70 seconds, and a high etching/ashing resolution of 10nm, resulting in accurate and uniform results. In addition, the equipment includes a variety of safety features such as an emergency stop switch, over-current protection, and dry-run protection of the valve. Chamber for Tactras Vigus Etcher/Asher is a powerful etching/ashing system that allows users to achieve superior results in a low-cost and time-efficient manner. Its numerous features, advanced PLC unit, and its impressive etching/ashing performance make it an outstanding choice for those seeking a reliable and efficient etching/ashing machine.
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