Used TEL / TOKYO ELECTRON Chamber for Tactras Vigus #9353007 for sale

TEL / TOKYO ELECTRON Chamber for Tactras Vigus
ID: 9353007
Wafer Size: 12"
Vintage: 2010
Chamber, 12" BEOL 2010 vintage.
TEL / TOKYO ELECTRON Chamber for Tactras Vigus is an etching/asher tool used to pattern circuit boards used in the fabrication of integrated circuits (ICs). It is comprised of four main components: the etching chamber, the heat diffusion plate, the chemical distribution head, and the substrate handling mechanism. The etching chamber is a cylindrical chamber made of stainless steel. Its interior is lined with heat-resistant, refractory material. The heat diffusion plate is placed at the bottom of the chamber. It is designed to evenly distribute the heat generated during etching across the entire chamber and the substrate surface. The chemical distribution head is responsible for delivering the etching chemicals to the etching chamber. It follows a series of precise movements to spray the etchant chemicals onto the substrate. It is designed to accurately measure and disperse the etchant chemicals and it is also able to remove any remaining residual chemicals from the etching chamber. The substrate handling mechanism is responsible for securely positioning the substrate in the etching chamber and positioning the structure for uniform chemical distribution. This mechanism is designed to handle a range of sizes and shapes of substrates and requires minimal calibration and inputs. TEL Chamber for Tactras Vigus is a reliable and efficient etching/asher tool. It is well-suited for patterning a variety of substrates ranging from glass wafers to polyimide sheets. Its advanced chemical handling capabilities allow for high precision in the etching process. Its ability to accurately measure and disperse etchant chemicals and its efficient heat diffusion plate makes etching a fast and efficient process. Furthermore, its control system allows for precise control over the etching process, including temperature and pressure levels, ensuring uniform etching of the substrate. TOKYO ELECTRON Chamber for Tactras Vigus is a reliable and cost-effective etching/asher tool for patterning a variety of substrates used in IC fabrication.
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