Used TEL / TOKYO ELECTRON Chambers for SCCM #293602570 for sale

TEL / TOKYO ELECTRON Chambers for SCCM are an advanced etcher and asher system ideal for precision-level processing of semiconductor substrates. Composed of both wet etching and dry ashing, TEL/TOK Chambers are designed to provide the highest levels of control and accuracy, improving yield rates and maximizing throughput performance. The Chambers consist of a stainless steel vacuum chamber with separate chamber components that enable accurate temperature and process control, delivering superior uniformity. Panasonic etching and ashing systems deliver reliable, repeatable results with low levels of substrate damage. The chambers are adjustable up to 6" wide and adjust certain conditions such as chamber pressure, temperature and pressure throughout the etch/ash process, ensuring maximum control and results. To further ensure accuracy and uniformity, the chambers incorporate innovative technologies such as uniform gas delivery and ablation energy - including a gas diffusion plate, allowing precise gas flow. A low pressure de-ionised (DI) water spray is also available, which helps to maintain an accurate target pressure in the chamber. This, in turn, helps to eliminate particle buildup on the substrate, ensuring precise etching, ashing and processing. Additionally, the Chambers feature a sealed electrode structure, which is designed to accommodate the wet etching process, providing a low pressure and precise, uniform etching. This helps to minimise any etching inconsistencies, resulting in lessened defects. The design also helps to promote high throughput and reduce cycle time. With durable construction, excellent temperature and process control accuracy, innovative technologies, and a highly reliable and repeatable performance, TOKYO ELECTRON/TOK TEL Chambers for SCCM are the ideal etcher and asher for cutting edge semiconductor substrates, improving yield rates and maximizing throughput performance.