Used TEL / TOKYO ELECTRON DRM #293607522 for sale

TEL (TOKYO ELECTRON) TEL / TOKYO ELECTRON DRM is an etching/ashing equipment designed for the semiconductor and photomask industries. It is a powerful automated system for etching large area substrates, quickly and accurately. It consists of a main process chamber and four sub-chambers. The main chamber is a large heated stainless steel enclosure, equipped with a heated inlet and outlet, exhaust unit, purge gas machine, process gas source, and sample transport tool. The sub-chambers are used to supply a variety of process gases, including fluorine, chlorine, hydrogen, nitrogen, and oxygen. The gases are stored in their respective sub-chambers and are run at the required pressures and temperatures in order to achieve the desired process. A vacuum pump is also provided for evacuation of the process chamber. The sample transport asset is comprised of a robot arm that moves the sample substrates from the main chamber to the sub-chambers. The model also has an integrated plasma source. This plasma is used to clean the chamber, exposing the surface to be etched to reactive ions. The plasma also aids in controlling the etching process by precisely controlling the density and type of ions that are present. This allows very precise process control. In addition, an interlock equipment is used in order to ensure that the chamber remains closed while the process is running. TEL DRM system is extremely versatile and can be used for a variety of etching applications, including the etching of thin films, fine patterns and feature machining. It is easy to set up and operate and is capable of providing superior results with minimal defects. The unit is also very energy efficient and economical, and is capable of producing high-quality etches in a short amount of time.