Used TEL / TOKYO ELECTRON Formula-1-H #293641258 for sale

TEL / TOKYO ELECTRON Formula-1-H is an etcher/asher designed for wafer-level device fabrication. It uses multi-chamber, multi-gas and multi-cassette processing and is capable of handling 100mm and 150mm wafers. With this etcher/asher, the wafer-level device fabrication process is much faster and more efficient than with conventional processes. TEL Formula-1-H etcher/asher is equipped with a multi-chamber platform that allows for both wet and dry etching. Its multi-gas feature adds versatility with up to four processable gases, allowing for an array of reactions. This allows for both deep etching and hard mask etching, as well as contact etching and anisotropic etching. The multi-cassette feature allows for controlled gas refilling, eliminating handling time and optimizing turnarounds. The isolation of process gases also improves environmental safety and can reduce the load on cleanrooms. TOKYO ELECTRON FORMULA 1H is designed for wafer-level device fabrication for both single- and multi-layer processes at high production throughput. It has a low-power consumption design, with a fast wafer transfer robot that can reduce process time. The multi-chamber platform is designed for flexibility and scalability, allowing for a variety of new processes that can be further refined as needed. The system also features a gold-plated chamber surface, reducing maintenance costs and ensuring cleaner processing. TOKYO ELECTRON Formula-1-H includes an automatic cleaning system to prevent process contamination. The system also includes advanced safety features, ensuring optimal operator safety. Formula-1-H etcher/asher is ideal for use in the semiconductor industry, enabling wafer-level device fabrication with maximum efficiency.