Used TEL / TOKYO ELECTRON Formula-1-H #9268382 for sale
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ID: 9268382
Wafer Size: 12"
Vintage: 2003
Nitride furnace, 12"
Gas process: DCS-SiN and ALD High-K on LPCVD
2003 vintage.
TEL / TOKYO ELECTRON Formula-1-H is a precision etcher / asher used in the fabrication of microelectronic devices. It is an ultra-high-precision etch process that combines industry-leading etch performance, along with ample plasma and exhaust capability, resulting in high uniformity and very low etching heights. This is accomplished by utilizing a planar magnetron, which allows for uniform etching heights, along with a proprietary algorithm for controlling the anode voltage. The entire etching apparatus is designed to minimize particle generation and improve process quality. TEL Formula-1-H utilizes advanced imaging technologies to achieve an ultra-high-precision process. This imaging technology recognizes thin film patterns and etches them with high precision and accuracy. In addition to etching materials, TOKYO ELECTRON FORMULA 1H can be used for pure etching as well as high aspect ratio etching and plating. This makes it suitable for a wide range of applications. The high-speed etching achieved through TEL / TOKYO ELECTRON FORMULA 1H is based on a combination of a high-precision etching process and the use of plasma anodic voltage adjustment technology. This high-speed etching makes it possible to realize ultra-precision etching in a short period of time, while avoiding any damage to the substrate material or surrounding components. High speed etching also improves the uniformity of etching height, enabling high-quality and high-precision finishing. The etching process is monitored by the automatic multi-frequency in-situ monitoring equipment, which provides very stable etching processes and precise etching conditions. Moreover, the automatic concentration control system ensures that the process is correctly and consistently adjusted to maintain optimal etching conditions, allowing for reliable and repeatable results. Finally, all of these features are incorporated into a single unit for a streamlined production process. Furthermore, this machine is also designed to be flexible and easily customized for specific applications and requirements. This ensures that Formula-1-H combines the most up-to-date technology with a highly efficient production process.
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