Used TEL / TOKYO ELECTRON Formula-1S-H #293647206 for sale

TEL / TOKYO ELECTRON Formula-1S-H is an advanced etching and ashing equipment designed for manual and automated semiconductor production processes. The system is built on an open-architecture platform, allowing for maximum flexibility in the selection of software, materials, and components. The etcher/asher unit consists of a processing chamber, powered by a high-speed electro-magnetic stirrer and a hotplate, which is used to preheat the wafers before processing. The chamber is capable of performing ashing and etching cycles in ultra-high vacuum (UHV), and is also equipped with a powerful high-frequency plasma source. The unit features a highly efficient wafer loading and unloading machine, with the capability to handle a wide variety of wafer diameters (from 2" to 6"). The setup also allows for either manual or automated operation, making it ideal for production deployments. The process control is highly advanced, allowing for detailed parameter settings, monitoring and documentation of each processing step. This ensures maximum repeatability and product quality. Additional features include a high capacity on-board gas supply, with high precision flow control for consistent etching/ashing results. The tool can also be integrated with an in-line metrology tool and real-time wafer cleaning asset, for increased efficiency and integrated quality control. TEL Formula-1S-H etcher/asher has been designed to meet semiconductor industry standards, providing safe and reliable results and making it an ideal choice for automation-driven production environments. The model is easy to install and maintain, with minimal user intervention and a built in calibration facility. This makes it ideal for modern semiconductor manufacturing operations.