Used TEL / TOKYO ELECTRON Formula-1S-H #293651983 for sale

TEL / TOKYO ELECTRON Formula-1S-H etcher/asher is designed for dependable, high throughput wafer etching applications. The equipment features a patented three-zone architecture, with a load lock and transfer chamber, an antechamber, and an etch reaction zone, for efficient oxidation and etching processes. TEL Formula-1S-H utilizes an integrated software system for automated and repeatable process control and monitoring. The unit is designed with a high-vacuum forming and cleaning chamber, capable of forming a high-vacuum environment of 1x10-6 torr. An automated cool down manifold ensures uniform and repeatable cooling of the substrate prior to etching. A simple and intuitive user interface allows the user to quickly program process conditions and gas flow rates. The main chamber contains a reaction zone for sample etching, featuring a variable-frequency, high-frequency generator for accurate control of the etching power. A rotating lifting arm adds to the stability of the machine and permits variable and repeatable etching. The chamber also features ultra-high-resolution mass flow controllers (MFCs) to provide hands-free process control and enabled RF power regulation via the forward power settings in electronic control unit (ECU). TOKYO ELECTRON Formula-1S-H etcher/asher also includes additional features such as enhanced multiple-zone control, superior etch uniformity, a large capacity cassette loader, an improved substrate heating manifold, and a redox-resistant, heavy-duty stainless steel chamber. A unique spring-washing tool further reduces the process time, while an automatic cleaning asset reduces etch residue formation and increases useful life of the internal components. Formula-1S-H etcher/asher utilizes a variety of safety options, such as gas purging with nitrogen, backside exhaust plenum, and other interlocks. An advanced infrared port is provided for monitoring the chamber temperature, and a comprehensive monitoring and process control model, as well as real-time process data acquisition are included to further ensure maximum process reliability. In conclusion, TEL / TOKYO ELECTRON Formula-1S-H etcher/asher is a highly reliable, efficient equipment for etching and ashing applications. A number of advanced features are included to ensure consistent results, as well as numerous safety features. This system is well suited for medium-to-high volume etching and ashing applications, and is backed by TEL industry-leading service and support.