Used TEL / TOKYO ELECTRON Formula-1S-H #293653295 for sale

TEL / TOKYO ELECTRON Formula-1S-H is a high-performance etcher / asher with a user-friendly design. The equipment has both top-loading and bottom-loading configurations with a single or dual-line system. The etcher / asher pressure control is maintained by a two-stage, two-station pressure regulator. The single line unit can handle up to five recipes simultaneously and the dual line is capable of up to 10 recipes at once. The machine also features a high-resolution X-Y-Z robot for loading and unloading substrates, as well as a programmable sidewall angle controller for precise etching and ashing processes. TEL Formula-1S-H etcher / asher utilizes a hybrid heating method with both RF and direct heating coils, ensuring temperature uniformity across the patch area. The chamber atmosphere is controlled through a turbo-molecular pump, allowing for continuous analysis and maintenance. A real-time interferometer is included to monitor the process, as well as a filter-less venting tool with a cooled exhaust. The asset also includes a programmable safety interlock with a lockout frequency limiter to protect the model and its operators. A convenience power supply allows for direct connection to the equipment, with a single-point electron beam power source. Finally, an infrared heating system is used to decrease the environmental temperature to the desired temperature. TOKYO ELECTRON Formula-1S-H etcher / asher is a reliable and flexible unit, capable of producing accurate results for any etching or ashing application. Its user-friendly design, integrated safety features and advanced temperature control capabilities make it a great choice for any etching and ashing operation.