Used TEL / TOKYO ELECTRON Formula-1S-H #293744364 for sale

ID: 293744364
Vintage: 2006
Diffusion furnace 2006 vintage.
TEL / TOKYO ELECTRON Formula-1S-H is a state-of-the-art etching / ashing equipment designed and engineered for the industrial fabrication of integrated circuits and microelectromechanical systems (MEMS). This advanced system is engineered to ensure high throughput, precision etching processes and can result in improved device yields, higher process reliability and shorter cycle times. TEL Formula-1S-H utilizes a high vacuum environment to ensure complete process control and predictable results. This high vacuuming feature helps to prevent deposition of contaminants on wafers and also helps to prevent cross-contamination from one batch of wafers to another. The unit can accommodate a range of wafer sizes from 2 inch to 8 inch in diameter, with process chambers designed for efficient process uniformity, uniformity of wafer positions and temperature. The etching process takes place in a low stress environment, which helps to minimize device stress and damage during the etching process. The machine utilizes advanced computerized temperature control and power management systems to ensure precise temperature and power control during the etching process. This temperature control tool has the capability to adjust the temperature of the sample according to the specified process parameters. The power management subsystems allow the user to adjust the power level of the etch and the deposition rates to achieve the best results. TOKYO ELECTRON Formula-1S-H also provides support for a wide range of wet and dry etching, ashing, sputtering and ion implantation processes. This asset is also integrated with a variety of remote monitoring systems, allowing users to monitor wafer condition, deposition and etch parameters in real-time. This technology ensuresthat the processes remain consistent and reliable. This advanced model also utilizes advanced monitoring systems to allow users to monitor the results of individual etching and ashing runs and to ensure process uniformity and stability. In addition, the equipment is fully customizable, allowing the user to specify the evacuation parameters, process chamber size, sample racks, target wafer sizes, orientation and other parameters. Formula-1S-H is a powerful and versatile etching and ashing system that is designed to ensure consistent and uniform processing results for applications in microelectronics and MEMS fabrication. This unit's advanced temperature and power management systems provide a reliable process control environment, while its remote monitoring capabilities allow users to monitor wafer condition, deposition and etch parameters in real-time. The machine's customizable configurations allow users to effectively scale the etching and ashing processes as needed.
There are no reviews yet