Used TEL / TOKYO ELECTRON Formula-1S-H #293796682 for sale
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ID: 293796682
Vintage: 2016
Furnace
Process: TEOS
Gas flow chart
Gases: Pure N2, 20% F2 / N2, HF, Q2
Power box
Exhaust box
WAVES Controller
Rapid Cooling Unit (RCU)
Pump diameter: 100 A
CKD VEC-V8 Series Valve
2016 vintage.
TEL / TOKYO ELECTRON Formula-1S-H (or F1S-H) is a chemical etcher / asher that offers precision etching/ashing capabilities for a variety of materials. The compact, four-gas equipment features two etching gas lines and two energy-inducing gas lines. The system is highly automated, enabling the user to program desired conditions for a variety of etching/ashing tasks. The F1S-H is equipped with advanced feature such as a high-resolution heater for precise temperature control. It also has independent control for all four gas lines, allowing for positive and negative pressure adjustment to maximize etching/ashing efficiency. The temperature of the unit is monitored by a Quartz composite thermocouple. The temperature can be adjusted in a range of 4-600℃ to match the material being etched/ashed. The F1S-H also features a multi-headed nozzle machine with interchangeable nozzles ranging from 3 to 55 micrometers with minimal distance between each nozzle. This allows the user to precisely adjust the size and shape of the etch pattern as needed, allowing for more accurate results. The F1S-H also has an advanced film handling tool that is perfect for both dry and wet films. The asset can handle film types such as Indium Tin Oxide, Gold, and Aluminum. The film substrates can be processed up to 8" wide with a film thickness of 3 - 15 microns. For safety measures, the F1S-H is equipped with in-chamber and external exhaust gas monitoring capabilities. This model is designed to automatically shut off the chamber when gas levels reach an unsafe level. TEL Formula-1S-H is the ideal solution for etching/ashing applications, providing precision and efficiency. Its advanced features and capabilities make it a viable option for a wide range of etching/ashing needs. With its compact design and robust equipment, the F1S-H is an economical and reliable choice for a variety of industrial, laboratory, and research needs.
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