Used TEL / TOKYO ELECTRON Formula-1S-H #9382422 for sale
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ID: 9382422
Wafer Size: 12"
Vintage: 2007
Vertical LPCVD Furnace, 12"
Process: ALDALZROX
(2) Load positions / Auto indexer loaders
F15 Workstation
Does not include Hard Disk Drive (HDD)
Missing parts:
Power box
RCU Unit
Equip water cooling unit
Ozonizer
Power supply: 400 VAC, 3 Phase
2007 vintage.
TEL / TOKYO ELECTRON Formula ALD High-K is an advanced etching/asher equipment optimized for the fabrication of semiconductor devices. Utilizing atomic layer deposition (ALD) techniques and high-k dielectric materials, TEL Formula ALD High-K provides precise control of the etch depth and excellent selectivity. This advanced etcher/asher boasts a reliable, repeatable vacuum process that is capable of removing materials while controlling their thickness. Its advanced cooling system ensures fast, uniform cooling rates across the wafer, reducing undesired laterally-defined etching. TOKYO ELECTRON Formula ALD High-K features a powerful high-efficiency motor that enables fast, precise etching techniques for the fabrication of the latest semiconductor devices. Its precision deposition head ensures high selectivity when etching substrates of various sizes. Formula ALD High-K is compatible with various types of substrates, including silicon, silicon oxide, silicate, molybdate, and quartz, among others, making it suitable for various semiconductor device applications. The unit also supports the use of high-k dielectric materials, which offer superior dielectric characteristics compared to traditional solutions. TEL / TOKYO ELECTRON Formula ALD High-K offers superior etch uniformity, making it the ideal etcher/asher for advanced semiconductor device designs. Its advanced high-k dielectric materials ensure superior etch results without sacrificing compatibility or reliability. Its high-efficiency motor allows for high-density, high-speed etching, while its accuracy ensures exacting results with a low total cost of ownership. Overall, TEL Formula ALD High-K is an advanced etcher/asher machine optimized for the fabrication of the latest semiconductor devices. Its sophisticated and reliable vacuum process, along with its compatibility with advanced high-k materials, makes this tool an ideal solution for any etch or ashing process. As a result, TOKYO ELECTRON Formula ALD High-K is a powerful tool for modern semiconductor device fabrication.
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