Used TEL / TOKYO ELECTRON Formula ALD High-K #9253876 for sale

TEL / TOKYO ELECTRON Formula ALD High-K is an advanced atomic layer deposition (ALD) equipment. It is an etcher/asher specifically designed for use in the fabrication of high-performance semiconductor devices such as nanoscale transistors and high-k materials. TEL Formula ALD High-K offers high process repeatability and uniformity, as well as scalability, while delivering the lowest-cost structure and highest-yield devices. Its precision process reliability, uniformity and high-yield manufacturability enable high-volume production and scalability. TOKYO ELECTRON Formula ALD High-K features an upgraded mass flow controllers (MFCs) with enhanced accuracy, providing users with a highly repetitive and reliable process. Additionally, monitoring the temperature and avoidance of wall deposits in the reactor provides efficient and easy recipe control. The system also supports large deposition areas, enabling users to expand their production capabilities. Formula ALD High-K offers state-of-the-art technology that is designed to meet broad application demands such as Advanced Power Devices (APD), ultra-high-k materials and other applications in ULSI technology. Some of the most advanced processes available in TEL / TOKYO ELECTRON Formula ALD High-K are its solid phase-Alumina deposition and Atomic Oxygen Process for the generation of high-k materials. The unit also supports self-configurable process parameters according to the application. TEL Formula ALD High-K is equipped with an innovative TELCMIX exhaust module, which features advanced multi-stage filtration. This efficient exhaust machine helps to maintain the optimal conditions inside the processing chamber and helps to reduce particle contamination. The integrated gas monitoring tool provides real-time gas flow and pressure control and ensures process repeatability. The asset is also supported by TEL cutting-edge TraxRecipe software, which helps users to create customized recipes with the help of an easy-to-use graphical user interface. TOKYO ELECTRON Formula ALD High-K is designed for applications that require precise control and repeatability, including high-k materials and nano-scaled transistors. The model is suitable for providing a cost-efficient, reliable and high-yield manufactured product, with its exceptional process repeatability and uniformity. This equipment is ideal forFabrication of high-performance semiconductor devices and components.