Used TEL / TOKYO ELECTRON Formula ALD High-K #9372779 for sale

TEL / TOKYO ELECTRON Formula ALD High-K
ID: 9372779
Vertical furnaces.
TEL / TOKYO ELECTRON Formula ALD High-K is a next-generation etcher and asher. It is a high-performance tool built for the advanced semiconductor process. It contains several cutting-edge features that enable users to achieve high-precision etching and ashing operations. The ALD High-K has a compact design that energy-efficiently delivers the power and speed required for accurate, repeatable etching. It is equipped with a 600 mm process chamber that allows etching of large, complex structures. The chamber is outfitted with a four-stage differential pumping system and optical monitoring equipment that increases precision and helps to ensure fine etching results. The tool can maintain stable processing conditions after long periods of usage, thanks to its advanced cooling system. In addition to its durable, high-performance hardware, the ALD High-K also boasts powerful software. Its advanced pattern-recognition algorithms facilitate optimal etching performance by detecting weakly etched parts in real time. Moreover, its user-friendly GUI interface helps facilitate efficient operation. The ALD High-K is compliant with a wide range of etch and ashing applications, including poly-silicon and silica etching, copper removal, metal anisotropic etching, and more. It is also capable of semiconductor process control, allowing users to further customize and optimize their etching processes. Overall, TEL Formula ALD High-K is a powerful, reliable etcher and asher designed to meet the needs of the modern semiconductor industry. Thanks to its cutting-edge hardware and software features, it is capable of delivering repeatable, precise results with every use.
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