Used TEL / TOKYO ELECTRON Formula #293596090 for sale

TEL / TOKYO ELECTRON Formula (TEL/TF) is an etcher / asher developed by TOKYO ELECTRON (TEL / TOKYO ELECTRON) for etching and ashing processes in the semiconductor industry. It is based on the company's unique technology and provides a reliable and efficient etching / ashing process for a broad range of device types. TEL/TF etcher / asher is a vacuum-based equipment that utilizes a number of advanced technologies to enable stable etching / ashing of precision architectures. It has a small footprint, which makes it suitable for a variety of etching / ashing processes. In addition, it features an automated process control system and advanced motion control that ensures uniform etch / ash parameters over the entire substrate. For the etching process, TOKYO ELECTRON/TF etcher / asher utilizes a reactive ion etching (RIE) process that can etch etched structures in a more controlled manner than with traditional RIE process. In addition, it has the capability to perform isotropic and anisotropic etching of various materials and can be used to produce 3D structures. The etching process use an inductively coupled plasma (ICP) with an integrated gas delivery unit that is controlled by an advanced controller. Meanwhile, the ashing process of TEL / TOKYO ELECTRON/TF etcher / asher utilizes Teflon-encapsulated infrared lamps to achieve repeatable, gas-tight, and chemically inert plasma for the removal of residual contaminants in the etching and other processes. The ashing machine can accurately adjust the pressure, temperature and chamber atmosphere to provide highly consistent and repeatable processes. Furthermore, TEL/TF etcher / asher features a wide range of electro-mechanical cassette transfers and accessories for automated substrate loading and handling. It also has advanced wafer heating and cooling systems as well as vacuum pumps for accurately maintaining substrate temperatures. TOKYO ELECTRON/TF etcher / asher is designed to be versatile and can be customized to meet the requirements of various etching / ashing processes. With its wide range of capabilities and advanced technologies, TEL / TOKYO ELECTRON/TF etcher / asher is a reliable and efficient solution for etching and ash processes in the semiconductor industry.