Used TEL / TOKYO ELECTRON Formula #293620669 for sale
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ID: 293620669
Wafer Size: 12"
Vintage: 2003
Furnace, 12"
(2) Load ports
(7) Boxes
Chamber
2003 vintage.
TEL / TOKYO ELECTRON Formula is a high-precision etching machine designed for ultra-fine circuit patterning and photomasking applications. TEL Formula is capable of performing etching processes using specialized substrates and materials with the utmost precision. The machine features an innovative automated wafer delivery equipment, allowing for the processing of high-volume orders in a timely and efficient manner. The high-precision etching process employed by the machine begins by loading a substrate into the chamber, which is then tightly sealed and purged of ambient air. Heaters and low-pressure electrons then evacuate the chamber and establish an optimum processing atmosphere. After this, the etching machine utilizes advanced Pulsed Laser Deposition (PLD) and Ion Beam Etching (IBE) technologies to create a range of multi-level metal and dielectric films. The precision of TOKYO ELECTRON Formula is further enhanced by its built-in atom absorption and source-target isolation systems. These systems reduce tolerences and fluctuations in etching parameters, thereby enabling the creation of fine line shapes and minute dot pitches. This further minimizes the risk of wafer deformation or etching errors. In addition, Formula is equipped with an embedded control system, enabling technicians to customize each process. The machine also boasts a robust auto-particle filtration and recovery unit, helping to reduce the possibility of dust or debris being incorporated into the films. Thanks to its unique automated passivation machine, the structure of each layer can be thoroughly monitored and adjusted to prevent damage. In conclusion, TEL / TOKYO ELECTRON Formula etching machines offer excellent precision and precision engineering for a range of photomasking and nanofabrication applications. Its range of advanced features, including its automatic wafer delivery and control systems, ensures that the most sensitive and intricate substrates can be processed efficiently and to the highest standards.
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