Used TEL / TOKYO ELECTRON Formula #9263869 for sale

TEL / TOKYO ELECTRON Formula represents a range of high-performance etch and ash systems designed for the semiconductor industry. These systems are designed to create ultra-precise features and to meet the strict regulatory requirements of the industry. TEL Formula is a versatile, robust, and reliable tool for etching and ash applications. The equipment allows for precision levels of up to ±0.001", providing reliable performance for even the most demanding substrates. TOKYO ELECTRON Formula uses a range of technologies to create optimal process results. Heat exchangers and wave reflow technology ensure uniform process temperatures and wafer topography. The system is equipped with plasma source-controlled electron-beam evaporation, providing highly consistent heating and etching operations. Electron-impact ionization (EI) ion source technology provides the highest possible rates of material removal and deposition. Formula also offers advanced process control capabilities, including automated channel switching, RF/DC power control, substrate temperature control, and process-specific recipes. The unit is comprehensively equipped with data logging and monitoring capabilities as well, simplifying documentation and analysis. The machine is also upgradeable to include multiple recipes, providing even greater flexibility and precision. TEL / TOKYO ELECTRON Formula utilizes advanced materials and featuring advanced features, including an advanced temperature control, etched quartz crucibles, an HD-compatible controller, software for controlling gas flow and pressure, and a model for pressure profiling. Its innovative design ensures uniform process conditions, excellent process stability, and efficient operation. The tool is versatile, offering multiple etch and ash solutions for virtually any substrate and application. TEL Formula is designed for ease of use, making it an ideal solution for laboratories or production facilities that lack the resources or personnel to operate a larger asset. Its modular design allows users to customize and expand their capabilities as needed. The model is also designed to be simple to maintain, with low maintenance and zero downtime required. TOKYO ELECTRON Formula is IEEE 1149.6- and SECS II-compliant, ensuring absolute process control. The equipment is built with optimized hardware and software to maximize system throughput and to ensure high process yields and high product quality. The combination of its advanced process capabilities, reliable performance, and low maintenance requirements make Formula an ideal choice for a variety of etch and ash applications.