Used TEL / TOKYO ELECTRON Formula #9263883 for sale

TEL / TOKYO ELECTRON Formula is an etcher/asher designed specifically for processing semiconductor wafers. The machine is developed through collaborative effort between TEL Ltd and a variety of other companies. It features a high-capacity, multi-loader equipment, as well as a highly-customizable user interface with advanced tracking and control options. The ASher (Advanced Sub-half Etcher) part of the system offers an etching chamber with up to 20 quartz wafers which can be processed in parallel. The etching process does not affect the temperature of the wafers, thus allowing the etching and ashing processes to be conducted in the same chamber. The etching chamber also offers end-point detection for precise etching control. Additionally, programmable processes in the chamber enable further customization for specific tasks. The machine also features an advanced track unit which allows for automated wafer tracking and control. This allows the user to monitor the etching and ashing processes with ease. This machine is also highly customizable and can be fine-tuned to the user's preferences. The track tool also includes options for manual manipulation and wafer removal. The user interface of TEL Formula was designed to be highly intuitive, offering simple and easy access to all available etching and ashing parameters. It also allows multiple simultaneous processes to be displayed on the same screen; this allows the user to monitor and control multiple batches at once. The machine is designed to be user-friendly and highly customizable. It is recommended for research and development purposes, as well as, for its reliability and ease of use for production level wafer fabrication. The advanced user interface, as well as the highly customizable track asset, make the machine very versatile and therefore suitable for any etching and ashing requirement.