Used TEL / TOKYO ELECTRON Formula #9287525 for sale
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TEL / TOKYO ELECTRON Formula is an etcher/asher, created and manufactured by TEL Ltd. It is used as for the high-precision etching of various materials that require specific surface finish. It provides superior etching accuracy and performance that is required for a variety of industrial applications such as thin-film deposition, dielectric etch and chemical mechanical polishing (CMP). TEL Formula consists of a chamber with a specific inner surface finish. It is designed to provide uniform gas diffusion and minimal wall influences on the chemical etching process. Inside the chamber is a high-powered light source, a substrate holder, a gas/chemical injection equipment, an exhaust system, and a controller. The light source illuminates the substrate and creates the desired pattern, while the gas/chemical injection unit provides the constituents required for the etching process. The exhaust machine is responsible for maintaining a safe and clean environment during etching by drawing away any fumes or particles created during the etching process. The controller coordinates the overall process, monitors the light intensity, air pressure, temperature and other variables in order to ensure a precise etch. TOKYO ELECTRON Formula is the perfect tool for high-precision etching applications, as it is capable of increasing etching accuracy and throughput. The controller provides a wide range of control settings and parameters, enabling users to customize their etching process for their specific requirements. The open structure of the chamber, combined with the uniform gas diffusion, ensures uniformities across the etched surface, improving the results of the process. Formula is a reliable etcher/asher, as it is provided with all of the necessary components to achieve accurate etching and finishes.
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