Used TEL / TOKYO ELECTRON Formula #9300652 for sale

TEL / TOKYO ELECTRON Formula is a type of etcher/asher that is used in the semiconductor industry. This etcher/asher is ideal for photolithography and etching applications. The machine can be used to etch through a range of materials such as aluminum, silicon, and polysilicon. It is also fitted with a wet-etching chamber which allows for more precise and cleaner etching results. TEL Formula is equipped with an electron beam source as well as a chemical vapor deposition, or CVD, chamber. The electron beam source provides a beam of electrons which can be used to break down material. This is especially useful when etching delicate patterns due to its precise and delicate nature. The CVD chamber allows materials to be deposited onto the substrate of choice. This is useful when precise layers are needed to form a device in the semiconductor industry. TOKYO ELECTRON Formula is controlled by a digital control equipment (DCS). This system allows operators to program in the parameters required to produce clean etching results. Such parameters include the beam current level, beam size, voltage, exposure time, gas pressure, flow, and gas composition. It also has an Optical Emission Spectrometry (OES) which helps monitor the chamber environment, while a scan electron microscope (SEM) is used to evaluate the etching results. Formula is maintained in optimal working condition using a range of tests and controls. Tests used to check the unit include visual inspection, voltage measurements, injection tests, and temperature and vacuum checks. The machine is then calibrated to ensure it is operating according to factory specification. TEL / TOKYO ELECTRON Formula is a powerful etcher/asher for semiconductor device fabrication. The accurate etching and deposition capabilities provided by the tool allow for the fabrication of high-quality devices with precise and clean results. The advanced digital control asset and wide range of tests and checks further ensure optimal working conditions and consistent results. This makes TEL Formula one of the most reliable and efficient etchers/ashers available.