Used TEL / TOKYO ELECTRON HT-800-R4 #9285739 for sale

TEL / TOKYO ELECTRON HT-800-R4
ID: 9285739
Dry etchers Process: Metal Substrate size: 680 mm x 880 mm.
TEL / TOKYO ELECTRON HT-800-R4 is a high-precision, high-throughput etching/processing machine designed for use in high-volume manufacturing of semiconductor components. The machine has two process chambers and a robot arm for etching/depositioning and wafer handling. The process chambers are equipped with a wide variety of etching/processing chambers, each with its own unique capabilities including Electron Beam Evaporation, High Density Plasma Etching, Ion Implantation, Chemical Plasma Deposition, and Sputtering. The robot arm can be programmed to handle wafer movement within the process chambers, making it efficient for large-scale, high-volume processing. The machine features variable throughput, allowing it to process up to 50 wafers per hour. It uses a three-tiered monitor system to monitor the temperature and pressure inside of the process chamber, as well as the deposition/etching rate, ensuring accurate and consistent results. Additionally, it has a light-cooling system that optimizes the injected gas. The machine is powered by a power supply which is capable of providing up to 500 watts. Additionally, it is designed to reduce software complexity, with a GUI user interface and enhanced program instructions that reduce the need for programming. TEL HT-800-R4 etcher/asher is built for high-accuracy, high-throughput processes and features low maintenance costs and minimal downtime. Its robust overall design makes it suitable for a wide range of applications in semiconductor manufacturing, and its flexibility makes it excellent for high-volume production runs.
There are no reviews yet