Used TEL / TOKYO ELECTRON HT910 #293621624 for sale

TEL / TOKYO ELECTRON HT910 is a high-throughput etcher / asher designed for high accuracy etching and ashing. TEL HT910 operates at 200W for etching and up to 500W for ashing, with a vacuum chamber of 48 liters, which allows for larger substrates to be processed. The process gas mixer of TOKYO ELECTRON HT910 can precisely control up to four gases within a given range, removing the need to purchase multiple units. The setup of HT910 is also simple. The user interface allows for full control of the etching and ashing processes, including process parameters, temperature monitoring and atmosphere control. TEL / TOKYO ELECTRON HT910 is designed with a self cleaning feature that automates the cleaning process eliminating the need for manual cleaning. This feature improves process reliability by prolonging the chamber lifespan and eliminating human error associated with cleaning. TEL HT910 also has a middle-pressure abatement equipment that achieves low exhaust purity levels, which allows it to meet the Clean Air Act emission requirements. TOKYO ELECTRON HT910 has excellent repeatability and reliability in etching and ashing. The system uses parallel light wave radiation to ensure uniformity in the etching process. HT910 is also capable of processing substrates of varying thicknesses with similar results. This makes it ideal for industrial environments. In terms of safety, TEL / TOKYO ELECTRON HT910 is equipped with a full range of safety features, including a gas purging unit, an exhaust hood and a closed-loop gas sensor machine. The closed-loop gas sensor tool detects harmful gases and activates the exhaust hood for additional protection. This ensures that the environment is safe for both the users and the substrates being processed. TEL HT910 etcher / asher is designed for high precision etching and ashing of substrates. It features a high throughput capacity, with a large vacuum chamber for larger substrate processing, and a self-cleaning feature for improved process reliability. TOKYO ELECTRON HT910 also offers excellent repeatability and reliable results and provides a range of safety features.