Used TEL / TOKYO ELECTRON Indy-A-L #293587758 for sale

TEL / TOKYO ELECTRON Indy-A-L is an etcher, or asher, that is used for substrate etching, lift-off, and metallization applications. TEL Indy-A-L is based on an advanced, high-throughput cryogenic etching technology. This technology enables high etch selectivity, superior aspect ratios, improved adhesive strength, and uniform layer coverage compared to many traditional etch technologies. TOKYO ELECTRON Indy-A-L is equipped with advanced optics, including a high resolution CCD camera, turbo-vacuum pump, and a plasma-ion source that provides optimal controllable processing conditions. This combination of optics and source enable enhanced process control and variability for etching and/or metallization tasks. Indy-A-L can process substrates of up to 8" x 6" in size, which makes it ideal for large, multi-point fabrication applications. The system is capable of processing a wide range of materials such as copper, gold, aluminum, titanium and many other metals. TEL / TOKYO ELECTRON Indy-A-L also features a highly efficient design with an ultra-low temperature chamber to optimize temperature-critical etching and metallization process. Additionally, the unit is equipped with a multi-segmented susceptor that offers a variety of lifting and coating techniques, including spin-coating, spray-coating, and electroless plating. TEL Indy-A-L comes with several safety features, including an automated wet bench and combustion chamber. With TOKYO ELECTRON Indy-A-L advanced etcher/asher, users can enjoy advanced etching capabilities with minimal input and configuration. Its surface treatment and metallization capabilities provide improved layer coverage and uniformity for a variety of tasks, including semiconductor device fabrication, MEMS fabrication, LED fabrication, and even more advanced processes. Its versatility and accurate process control make it an ideal solution for a wide variety of industrial applications.