Used TEL / TOKYO ELECTRON Indy-A-L #293643254 for sale

TEL / TOKYO ELECTRON Indy-A-L etcher/asher is a dedicated device within the semiconductor manufacturing process that removes unwanted oxide and poly-silicon layers from a silicon wafer. This process enables the fabrication of transistors and other semiconductor devices. TEL Indy-A-L machine is design to perform highly efficient RIE (reactive ion etching) and ashing on a small wafer scale. It features a multi-frequency RF (radio frequency) generator that helps produce efficient processing of up to 150 mm wafer sizes. The RIE process removes the unwanted material layer from the wafer by breaking up the atoms on the surface of the wafer and generating an ionized plasma plume that quickly and accurately removes surfaces with minimal damage. TOKYO ELECTRON Indy-A-L also has a multi chamber design with independent heating elements, which can be configured to optimally process wafers that require different processing temperatures and chemical material ratios. In addition, the machine is equipped with both an accelerated chemical ashing process and an integrated dry-etch gas delivery system, which allow different angles of etch angles and resulting depths to be achieved. In addition, Indy-A-L is designed with a smart auto-matching capability, which automatically adjust the RF frequency and energy for optimal results. It also features multi-stage plasma depth control, which allows for multiple etching processes to be completed to precision in a single operation. This includes a back-side ion source feature, which can be used for removing or etching back-side coatings. These features result in a highly efficient and reliable etch process for a variety of semiconductor applications. Overall, TEL / TOKYO ELECTRON Indy-A-L etcher/asher is a reliable, efficient and accurate device for the fabrication of semiconductor device structures.