Used TEL / TOKYO ELECTRON Indy-A-L #293643265 for sale

TEL / TOKYO ELECTRON Indy-A-L is an innovative semiconductor device etcher/asher. This all-in-one equipment brings together etching and ashing capabilities into one compact unit. Along with its compact size, TEL Indy-A-L offers precision control, excellent system performance, and robust safety features. TOKYO ELECTRON Indy-A-L supports thermal oxide etching, oxide pattern etching, and oxide mask stripping, as well as annealing, sintering, and reflow. It can accommodate three sets of substrates up to 6 inches in size. In addition, its advanced process control features allow for optimized etching and ashing performance. Indy-A-L runs on a powerful Windows-based HMI software with a large, user friendly touchscreen and easy process navigation. It also offers automatic, integrated process control and recipe management functions for simple and consistent operation. Its intuitive menu unit provides complete control over all of its etching and ashing processes. TEL / TOKYO ELECTRON Indy-A-L also boasts an impressive array of safety features. With its built-in safety machine, it can monitor the stability of its process conditions, preventing any hazardous process problems. Its multiple safety interlocks further protect personnel and machines within the vicinity of the tool. Overall, TEL Indy-A-L offers a robust etching and ashing solution in a compact, user friendly package. With its advanced hardware, HMI software, and robust safety features, it is an ideal choice for semi-conductor device fabrication and substrate etching/ashing solutions.