Used TEL / TOKYO ELECTRON Indy-A-L #293643266 for sale

ID: 293643266
Vintage: 2007
Vertical furnace 2007 vintage.
TEL / TOKYO ELECTRON Indy-A-L is a highly advanced etching / ashing equipment designed for use in semiconductor device fabrication. As one of the leading etching solutions providers in the industry, TEL Indy-A-L offers excellent reliability, performance and innovative technologies to meet the needs of today's semiconductor manufacturing processes. TOKYO ELECTRON Indy-A-L system incorporates a fully-automated, high-resolution, multi-step etching process to promote efficient and accurate operation. Indy-A-L unit is capable of etching a variety of materials, including photoresists and dielectric layers, and can be easily programmed to accommodate the exact parameters required for individual processes. TEL / TOKYO ELECTRON Indy-A-L machine uses a proprietary plasma tool with high-resolution control capabilities to ensure optimal etching results. The asset is capable of executing numerous etching steps with precision and uniform results, using up to 8 stages for deep etching. It also incorporates a low-cost, low-maintenance plasma source designed to reduce operating costs and provide optimal etching efficiency. TEL Indy-A-L model is designed with accuracy and reliability in mind, featuring automated recipe management, equipment diagnostics, and advanced recipe loading and recovery. Moreover, the system is designed to be modular and flexible, allowing for easy upgrades and customizations as needed. TOKYO ELECTRON Indy-A-L unit comes with advanced software for recipe management and flexibility, which includes easy-to-use pattern interpolation, step interpolation, and error recovery. This software allows users to easily configure the machine to meet their specific process requirements, while helping to protect against potential errors or mis-steps. An impressive range of process options are supported on Indy-A-L, including standard wet etching, dry etching, plating, resist thinning, and annealing. In addition, the tool can be adapted to suit processes such as contact etching, deep reactive ion etching, and deep wet etching, making it an ideal solution for complex fabrication processes. TEL / TOKYO ELECTRON Indy-A-L is a powerful and reliable asset that offers excellent results for etching and ashing applications in semiconductor device fabrication. Thanks to its high performance and advanced features, TEL Indy-A-L is a leading etching solution that helps bring efficiency and reliability to the entire fabrication process.
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