Used TEL / TOKYO ELECTRON Indy-A #293591335 for sale

TEL / TOKYO ELECTRON Indy-A is a high-performance etcher/asher equipment designed to meet the requirements of the most advanced semiconductor technology applications. The system's customizable platform provides a suite of process capabilities, consisting mainly of dry etching, dry ashing, and wet cleaning. It is ideal for a range of applications including intermediate etching of copper metallization, back end of line processing, advanced packaging, and others. TEL Indy-A unit utilizes a downstream-type etch configuration with a main chamber that is climate-controlled to ensure consistent process conditions. It is designed with a range of power source options, including RF, DC, and pulse, which enables it to meet the process requirements of a variety of parameters. It also offers a high degree of flexibility for recipe optimization and process implementation. TOKYO ELECTRON INDY A is outfitted with a multi-gas source deployable from the side of the main chamber, and offers custom gas-delivery options such as variable flow, multiple remote capsules, and manifold selections. This combination produces a high-resolution etching process with unrivaled consistency and repeatability. TEL INDY A includes an array of advanced process monitoring and safety features to ensure operation along an optimized profile. This includes an advanced inverted process configuration, allowing an observer to quickly diagnose the plasma generation mechanism and offering a fast and more accurate diagnosis of any problems that might arise in the etcher chamber. Additionally, the machine features a state-of-the-art real-time sensor feedback control mechanism, providing highly accurate monitoring of etch control parameters including etch rate, oxygen concentration, and temperature. Indy-A provides automation options to ensure a greater degree of flexibility, accuracy and speed in product manufacturing. The tool is also equipped with a specialized cleaning asset, allowing for high-level surface cleanliness. INDY A is ideal for high-volume production, offering users excellent productivity and reliability.