Used TEL / TOKYO ELECTRON Indy-A #293591336 for sale

TEL / TOKYO ELECTRON Indy-A
ID: 293591336
Wafer Size: 12"
Vertical diffusion furnace, 12".
TEL / TOKYO ELECTRON Indy-A is an etching machine that is utilized in the photolithography stage of semiconductor fabrication. Specifically, TEL Indy-A is used to transfer a detailed pattern onto a substrate material by etching away portions of the surface. TOKYO ELECTRON INDY A is accessible from TEL R&D Tokyo, a reputable provider of semiconductor processing equipment. The etching equipment offers efficient, long-term production capability in a small form factor. This makes the system an ideal solution for semiconductor fabrication shops with limited space. The unit is also compatible with a variety of substrates, including six inch, eight inch and twelve inch wafers. This versatility allows applications such as multi-level interconnects, photomasks, MEMS and other complex microfabrication processes to be completed with greater accuracy. TEL INDY A makes use of Dry Etch (DE) techniques, which allow for the etching of more intricate patterns. This process utilizes pre-treatment with chemical vapor deposition (CVD) and chemical mechanical polishing (CMP) to prepare and form the substrate prior to etching. These pre-treatment and post-etching processes improve adhesion, planarization and surface finish. At the heart of Indy-A is its ability to etch (scrub) successive layers quickly and accurately. The etching process is accelerated by the use of a bias voltage, in order to maximize the rate of etching in a controlled and repeatable manner. This ensures that each wafer is etched with uniform and predictable features each time. INDY A also comes equipped with advanced safety features, such as a gas supply button, tank leak detector, pressure regulator and airlock sensor. These features ensure that all effluents are safely contained, minimizing contamination. TEL / TOKYO ELECTRON INDY A is a reliable, high-quality etching machine that offers the best of both worlds: the cutting-edge technology of today, plus the precision and repeatability of historical processes. It is the perfect tool for any semiconductor fabrication company looking to expand their production efficiency.
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