Used TEL / TOKYO ELECTRON Indy-A #9214145 for sale

TEL / TOKYO ELECTRON Indy-A is an etcher / asher specifically designed for precise, efficient and reliable processing of semiconductor wafers. Operating with high accuracy and repeatability, TEL Indy-A etcher is ideal for use in a wide variety of advanced production applications. The state-of-the-art tool features advanced process control technology with corner-to-corner edge definition, edge chasing and detection capabilities and a high throughput plasma etch technology. TOKYO ELECTRON INDY A is equipped with an automated load lock exchange, resulting in minimal contamination and improved throughput. Additionally, its low-kV process window provides fast etch rates, as well as improved epitaxial layer etch rates. Using a Local Oxidation of Silicon (LOCOS) process, TOKYO ELECTRON Indy-A can etch a thin, uniform layer of insulation with selectivity, meaning that only the intended area is exposed to the etching process. This selective etching technology is essential for producing highly accurate, very precise electronic circuitry. The LOCOS process is supported with a range of features, including advanced oxidation control technology (ACT), highly advanced edge definition capabilities, corner protection, and customizable software recipes. With the advantage of advanced automation, INDY A has the capability to etch and clean wafers quickly and accurately, with an unparalleled efficiency and uniformity of results. TEL / TOKYO ELECTRON INDY A is extremely accurate and uniform, with a repeatability of <5% across the entire wafer surface. It provides a wide variety of process capabilities, resulting in superior results. Indy-A also features an advanced web characterization system (WCS) that allows customers to manage multiple processing recipes with ease, resulting in higher yields and improved process efficiency. In addition, TEL INDY A is equipped with advanced process monitoring, control and feedback capabilities, which feedback data to users in real-time. This information allows operators to make real-time adjustments to the process, ensuring that the final product meets the highest level of quality standards.