Used TEL / TOKYO ELECTRON Indy-A #9302270 for sale

TEL / TOKYO ELECTRON Indy-A is an etcher / asher equipment designed for highly reliable precision etching and ashing. The system offers a complete etch-and-ash capability for all kinds of substrates, including metals, alloys, non-metals and silicon wafers. TEL Indy-A is driven by a programmable logic controller (PLC) unit that ensures optimal etching and ashing results. It is composed of several components, including an etching chamber, etching nozzle, shower head and exhaust pipe. TOKYO ELECTRON INDY A's etching chamber is designed to deliver uniform etching activity for the substrates. It is equipped with a gas source that can provide a wide range of process gas combinations, including nitrogen/oxygen mixtures for plasma etching. Furthermore, a high voltage source is incorporated to generate a plasma which can be adjusted to the desired level. The etching nozzle is conveniently located at the back of the etching chamber and it provides a uniform, high-pressure gas flow to accelerate etching process. The gas flow is adjustable by using the nozzle selector and can be directed to different areas of the edge-wall of the etching chamber. TEL / TOKYO ELECTRON INDY A's shower head is also built-in on the etching chamber and is designed to provide a special coating or cleaning. The etching nozzle and shower head are combined to provide a uniform etch and ashing activity. The machine also has an exhaust pipe which is connected to the top of the etching chamber to exhaust toxic fumes. TOKYO ELECTRON Indy-A is a powerful and reliable etcher / asher tool. Its programmable logic controller (PLC) asset ensures a precise etch-and-ash process while eliminating errors. Furthermore, it is engineered to deliver high quality etch-and-ash results with minimal time and material waste. The model is a great choice for highly precise etching and ashing of various types of substrates.