Used TEL / TOKYO ELECTRON Indy-A #9355273 for sale

TEL / TOKYO ELECTRON Indy-A is an asher / etcher equipment for the production of semiconductor devices. It offers superior plasma etching and cleaning capabilities, with a low-temperature process window. TEL Indy-A system is available in two models, the 300i and 500i, allowing for the processing of 300mm and 500mm substrates. Both models have an embedded CCD and X-Y scanner that provides precise substrate positioning for efficient etching. TOKYO ELECTRON INDY A unit also has superior implantation capability for doping implants. It has a low voltage operation for the implantation of low-concentration substrates. The machine has an independent process arm which is capable of processing single- or multi-wafer runs, allowing for an optimal efficiency of up to 18+ wafers per hour. TEL INDY A tool is PECVD and ICP compatible, offering superior chamber cleanliness. It utilizes a touch-sensing/positioning mechanism and the Chameleon 12 PECVD asset for plasma etching which allows for both low and high temperature processes. The model is designed for fast and accurate etching of any size wafer. Indy-A equipment is highly versatile, enabling flexibility and customization. It offers "smart" functions to improve system performance, such as thermal monitoring, web assist, and substrate mapping. The unit also provides low- and high-pressure options, as well as vacuum- and air-based operation modes. The machine includes integrated software that provides real-time process control. The tool also includes process development tools such as recipe-building utilities and automated diagnostics. TEL / TOKYO ELECTRON INDY A features a low-cost, fully automated operation which is designed for efficient, on-demand production. In addition, INDY A is RoHS compliant and is designed to reduce the harmful environmental impacts of semiconductor production. In summary, TOKYO ELECTRON Indy-A is an advanced asher / etcher asset that offers precise, automated processing of single- and multi-wafer runs with superior process capabilities. TEL / TOKYO ELECTRON Indy-A features high performance effectiveness with low-cost, flexible components, and is designed to achieve precision etching with minimal environmental impacts.