Used TEL / TOKYO ELECTRON Indy-B-L #293634371 for sale

TEL / TOKYO ELECTRON Indy-B-L is an etcher / asher equipment designed to meet the etching/ ashing needs of the semiconductor manufacturing industry. It is a fast, cost-effective system that provides precise etch depth control, improved throughput and stable operation. TEL INDY B L offers an array of features, including programmable temperature control, gas flow control, pressure control, as well as five pre-defined etch/ash recipes that can be set for different wafer sizes and device processes. TOKYO ELECTRON INDY B-L is a full-size chamber unit which utilizes both electrostatic chuck (ESC) and Pulsed DC Plasma (PDP) capabilities. The ESC is used to hold the wafer during etch / ash processes, while the PDP provides an additional capability to deliver process gases more efficiently. The machine also has an Internal Mass Flow Controller (MFC) and optional external MFCs which allow precise ion energy control, helping to prevent wafer breaking and achieve excellent product quality. INDY B-L's stepped showerhead design offers uniform reaction in the vertical direction. It also offers the flexibility to use a variety of etch/ash recipes which can be programmed for different wafer sizes and device processes. These recipes can also be adjusted for pressure, temperature, and total pressure or range. TEL Indy-B-L also offers enhanced productivity with improved throughput, reduced cycle time and increased wafer yield. Indy-B-L also provides an integrated EGA/FIB port for wafer characterization. The dual EGA/FIB port allows for an analysis of the reaction pressure and temperature conditions during the etch/ash process, as well as a assessment of both the current etch speed and the amount of material removed in the etch/ash process. INDY B L also provides additional components such as a contamination and exhaust machine to help reduce airborne particles and odors, and a purge gas panel to protect and compress the plasma chamber. Other features include an integrated EGA/FIB port connection, an operator interface with menu driven recipe control, as well as safety interlocks and alarms that protect the user and tool. Overall, TEL INDY B-L offers precise, cost-effective etching/ashing with excellent repeatability, improved throughput and optimal process control, making it an ideal solution for the semiconductor manufacturing industry.