Used TEL / TOKYO ELECTRON Indy-B-L #293637434 for sale
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ID: 293637434
Wafer Size: 12"
Vintage: 2007
LPCVD Furnace, 12"
Wafer type: Si semi STD Notch
(100) Production wafers
Maximum operating temperature: 500-1000
N2 Load lock
Boat type handling position
O2 Density control for N2 Load lock
N2 Boat shower wafer cooling
560A Furnace temperature controller
VMM-56-002 Heater
Wafer / Carrier handling:
(25) Carrier type: FOUP
ENTEGRIS A300
Carrier stage capacity: 16
Pin pad A, B
Fork material: Al203 and peek
With type: 1+4 Edge grip
With auto teaching
Furnace facilities:
Furnace exhaust connection point: Top connection
Cooling water connection point: Bottom connection
Gas specification:
IGS 1.5" W-seal rail-mount
FUJIKIN IGS
Tubing bend bend (Less than 90°)
HORIBA STEC
Incoming gas connection point: Bottom connection
Gas vent connection point: Bottom connection
Gas unit exhaust connection point: Bottom connection
Process gas exhaust connection point: Bottom connection
Exhaust specification:
MKS Vacuum gauge-press controller
MKS Vacuum gauge-press monitor
MKS Vacuum gauge-pump monitor
CKD-VEC Main valve
Condenser
Reactor specification:
Tube material: Quartz (outter), quartz (inner)
Inner tube type (LP): Straight
Inner T/C: Outer tube inferior (wall type)
Tube sealing: O Ring
Soft backfill injector
Boat type: (117) Slots, pitch, 8 mm
Boat rotation
Pedestal type: Quartz
No shutter purge type
Interface specification:
Host communication: Comply with GJG
Equipment host I/F Connection: Gas box top HSMS
Ingenio
OHT Capability
Load port operation: Upper
PIO I/F Location: FNC Top
HOKUYO DMS-HB1-Z PIO
RF Carrier ID Reader writer type
CIDRW L/P: Read and write
ASYST ATR 9100 CIDRW
TEL CIDRW
User interface
Signal tower model: Customized
Signal tower colors (From the top): Red / Green / Yellow
Signal tower location: Front
Front operation panel
MMI and gas flow chart: Gas box and front operation panel installed
Indicator type: Superset
Operator switch: Operator access / orange
Pressure display unit (Gas inlet / vacuum): Mpa / Pa
Cabinet exhaust pressure display unit: Pa
Gas leak detector:
Gas1 / SiH4
Gas2 / PH3
Gas3 / ClF3
Cable length:
FNC-Power box: 20 meter
Power box -refill system: 30 meter
Power specification:
Voltage: 208 VAC, 3 Phase
Phase connection type: Star connection
Voltage single-phase: 120 VAC
Single-phase connection type: Grounded
Frequency: 60 Hz
Power cable input entrance location: Power box top
2007 vintage.
TEL / TOKYO ELECTRON Indy-B-L is an etcher / asher designed for the semiconductor and compound materials industries. It is an advanced, reliable, and highly precise etch / ashing equipment used to manufacture the finest of materials. TEL INDY B L etcher features a programmable stages system that can perform various functions such as pre-cleaning, degassing, ashing, etching and etch/healing. The pre-cleaning stage is used to remove contaminants from the substrate while the degassing stage removes unwanted gas molecules. The ashing process removes surface atoms, while the etching process removes delicate and hard layers from the substrate. The etch/healing stage is used to reduce the residual stresses on the substrate. The etcher utilizes the advanced AI-based Smart Cooling Unit (SCS) to maintain optimal temperatures for precise etching. TOKYO ELECTRON INDY B-L offers a wide range of specialized etching capability, including deep etch, post-etch unification and low temperature etching. The machine also offers precise surface modification of parts as small as 10 nanometers, making it ideal for high-end applications such as MEMs and LSI devices. The etcher is also fully automated and can be operated through its simple touch-panel interface. TOKYO ELECTRON INDY B L also offers comprehensive safety features to ensure the protection of its operators and the surrounding environment. It is equipped with a highly sophisticated built-in Vacuum Leak Detection Tool (VLDS) to identify any potential leaks. It also features a Standardized Gas Supply Asset (SGSS), where gases are only supplied through the model if safety conditions permit. Finally, the Innovative eco-friendly Cooling Equipment (KIECS) conserves energy by automatically reducing gas consumption during pauses in the operation. Overall, Indy-B-L is a sophisticated etcher/asher designed for high-end applications in the semiconductor and compound materials industries. It features advanced features such as the SCS, VLDS, SGSS and KIECS, and offers precision etching down to the nanometer-scale. Its safety features ensure optimal safety conditions and its sophisticated touch-panel interface make it easy to operate.
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