Used TEL / TOKYO ELECTRON Indy-B-L #293637436 for sale

TEL / TOKYO ELECTRON Indy-B-L is an indoor wafer etcher/asher creating thin oxide films on semiconductor wafers. It is a high performance, medium-throughput, single-chamber dry etching equipment. The system is fully automated with an operator's interface providing users with a user-friendly process control and optimization. TEL INDY B L unit is capable of performing both etching and ashing processes for a large variety of applications such as CoO, AlOx, ITO, and others. Inside TOKYO ELECTRON INDY B-L there is a 5 layer Quartz chamber, adjustable pressure pipes, and 4 independently controlled jet N2 purge outlets. The pressure is monitored and controlled by the components inside the control rack; a sensor sends readings both outside and inside the chamber. The N2 purge outlets and parameter setup in the etcher/asher enable precise and complete exhaust of the reaction gas for residue free wafers. TEL Indy-B-L has a chamber maximum size ranging from 200 mm to 8 inches with the highest temperature processing of up to 400°C. High-density, ECR plasma is generated by the magnecreons which can be individually adjusted in order to achieve high quality results with a low load level and excellent matching characteristics across the rotation axis. The ECR source plasma offers improved uniformity in active layer etching at higher etching rate and better selectivity than traditional arc sources. INDY B-L is also equipped with an absorbent filter that automatically changes color in order to indicate the degree of contamination. This feature is useful for maintaining a consistent quality in both batch and single wafer processes. The absorbent will absorb and collect dust particles from the etching or ashing process, preventing it from entering the machine and contaminating the wafers. The programmable wafer-handling robot and transfer arm included with TEL / TOKYO ELECTRON INDY B L allows for batch and single wafer processing. It also provides an easy, safe wafer handling for a single operator. Additionally, there is a wafer detecting laser tool that makes sure the robot stays calibrated and reaches the optimal position when transferring and etching the wafers. TEL INDY B-L with its ECR plasma source and precise oven setting provides repeatable etching/ wiring with low uniformity errors, excellent process control and a low maintenance cost. It is a highly reliable asset with simple and intuitive user interface controls and alert functions, ideal for batch and single wafer processing applications.