Used TEL / TOKYO ELECTRON Indy-B-L #293637439 for sale
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ID: 293637439
Wafer Size: 12"
Vintage: 2012
LPCVD Furnace, 12"
Wafer type: Si semi STD Notch
(100) Production wafers
Maximum operating temperature: 500-1000
N2 Load lock
Boat type handling position
O2 Density control for N2 Load lock
N2 Boat shower wafer cooling
560A Furnace temperature controller
VMM-56-002 Heater
Wafer / Carrier handling:
(25) Carrier type: FOUP
ENTEGRIS A300
Carrier stage capacity: 16
Pin pad A, B
Fork material: Al203 and peek
W/T Type: 1+4 Edge grip
W/T Auto teaching
Furnace facilities:
Furnace exhaust connection point: Top connection
Cooling water connection point: Bottom connection
Gas specification:
IGS 1.5" W-seal rail-mount
FUJIKIN IGS
Tubing bend bend (Less than 90°)
HORIBA STEC
Incoming gas connection point: Bottom connection
Gas vent connection point: Bottom connection
Gas unit exhaust connection point: Bottom connection
Process gas exhaust connection point: Bottom connection
Exhaust specification:
MKS Vacuum gauge-press controller
MKS Vacuum gauge-press monitor
MKS Vacuum gauge-pump monitor
CKD-VEC Main valve
Condenser
Reactor specification:
Tube material: Quartz (outter), quartz (inner)
Inner tube Type (LP): Straight
Inner T/C: Outer tube inferior (wall type)
Tube sealing: O Ring
Soft backfill injector
Boat type: (117) Slots, pitch, 8 mm
Boat rotation
Pedestal type: Quartz
No shutter purge type
Interface specification:
Host communication: Comply with GJG
Equipment host I/F connection: Gas box top HSMS
Ingenio
OHT Capability
Load port operation: Upper
PIO I/F Location: FNC Top
HOKUYO DMS-HB1-Z PIO
RF Carrier ID reader writer type
CIDRW L/P: Read and write
ASYST ATR 9100 CIDRW
TEL CIDRW
User interface
Signal tower model: Customized
Signal tower colors (From the Top): Red / Green / Yellow
Signal tower location: Front
Front operation panel
MMI and gas flow chart: Gas box and front operation panel installed
Indicator type: Superset
Operator switch: Operator access / orange
Pressure display unit (gas inlet / vacuum): Mpa / Pa
Cabinet exhaust pressure display unit: Pa
Gas leak detector:
Gas1 / SiH4
Gas2 / PH3
Gas3 / ClF3
Cable length:
FNC-Power box: 20 meter
Power box -refill system: 30 meter
Power specification:
Voltage: 208 VAC, 3 Phase
Phase connection type: Star connection
Voltage single-phase: 120 VAC
Single-phase connection type: Grounded
Frequency: 60 Hz
Power cable input entrance location: Power box top
2012 vintage.
TEL / TOKYO ELECTRON Indy-B-L is an etcher (also referred to as an asher) that is used in the manufacturing of semiconductor devices. It is a single-wafer equipment built on an automated platform and provides high precision. It has a loading/unloading system that can handle over 300 wafer/hour, ensuring quick and accurate processing while maintaining the highest yield. TEL INDY B L is designed with a robust and reliable unit that enables an extreme level of productivity and accuracy for the most demanding manufacturing. TOKYO ELECTRON INDY B-L comes with a direct-drive load port that minimizes cycle times and ensures stable etching conditions. It also has a wafer-handling machine that ensures wafers are tightly secured for safe transfer to process tools and that prevents misalignment or breakage during handling. TOKYO ELECTRON Indy-B-L's advanced control tool and comprehensive message center provide real-time insight into etching processes, helping ensure optimal results. TEL / TOKYO ELECTRON INDY B L has an advanced open-air technology with a variety of etch recipes. This allows consistent performance and quality on each wafer and allows the etcher to etch with a wide range of gases and media. TEL / TOKYO ELECTRON INDY B-L also has an integrated process analytical module that allows process monitoring to be done in real-time to ensure optimal results while preventing any over-etching. In addition to these features, TOKYO ELECTRON INDY B L offers a wide range of custom specifications to suit the needs of the customer. TEL Indy-B-L is available in a range of sizes and designs, can be configured for a variety of media, and offers in-situ cleaning capabilities. Indy-B-L also has a wide temperature range, allowing for precise and even processes. Overall, TEL INDY B-L is an etcher that offers superior performance and quality while providing increased yields and fast cycle time. Its wide range of features and custom configurations make it an ideal solution for semiconductor manufacturing.
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